Laboratory 
for Electrical 
Properties of 
Semiconductors 

Deep Level Transient Spectroscopy

A tool for investigation active defects (traps) in semiconductors. It gives insigth into defect parameters: activation energy and capture cross-section. Our DLS-82E system operating within 77-300 K temperature range consists of:

  • Keithley 2601A I-V source-meter​,
  • Boonton 7200 capacitance meter,
  • Janis CCS-150 hellium cryostat,
  • CTI-Cryogenics 8200 Compressor,
  • Pfeiffer Vacuum pump,

and gives us an opportunity for Laplace DLTS technique.